JPH0313734U - - Google Patents
Info
- Publication number
- JPH0313734U JPH0313734U JP7447889U JP7447889U JPH0313734U JP H0313734 U JPH0313734 U JP H0313734U JP 7447889 U JP7447889 U JP 7447889U JP 7447889 U JP7447889 U JP 7447889U JP H0313734 U JPH0313734 U JP H0313734U
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- vapor deposition
- chemical vapor
- deposition film
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7447889U JPH0313734U (en]) | 1989-06-26 | 1989-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7447889U JPH0313734U (en]) | 1989-06-26 | 1989-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313734U true JPH0313734U (en]) | 1991-02-12 |
Family
ID=31614200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7447889U Pending JPH0313734U (en]) | 1989-06-26 | 1989-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313734U (en]) |
-
1989
- 1989-06-26 JP JP7447889U patent/JPH0313734U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0313734U (en]) | ||
| JPH03161926A (ja) | 半導体装置の製造方法 | |
| JPH01228169A (ja) | 半導体装置 | |
| JPH0376139U (en]) | ||
| JPS62142839U (en]) | ||
| JPH02208960A (ja) | 半導体装置の製造方法 | |
| JPS62166626U (en]) | ||
| JPS6430252A (en) | Semiconductor device | |
| JPS59195859A (ja) | 半導体装置の製造方法 | |
| JPH0487650U (en]) | ||
| JPH0310530U (en]) | ||
| JPH0272530U (en]) | ||
| JPS62136026A (ja) | 半導体装置の製造方法 | |
| JPS6149437A (ja) | 半導体装置 | |
| JPS6161016U (en]) | ||
| JPH01129260U (en]) | ||
| JPS6218041A (ja) | 半導体装置の製造方法 | |
| JPS6455553U (en]) | ||
| JPS6240852U (en]) | ||
| JPH0358414A (ja) | 半導体装置の製造方法 | |
| JPS61190130U (en]) | ||
| JPS6439656U (en]) | ||
| JPS6336565A (ja) | 半導体装置の製造方法 | |
| JPH0529137U (ja) | プラズマエツチング装置 | |
| JPS61114839U (en]) |